{"id":3943,"date":"2023-09-12T12:58:20","date_gmt":"2023-09-12T12:58:20","guid":{"rendered":"https:\/\/plassmat.cnrs-imn.fr\/techniques-and-equipment\/ellipsometry\/"},"modified":"2024-01-26T09:57:57","modified_gmt":"2024-01-26T09:57:57","slug":"ellipsometry","status":"publish","type":"page","link":"https:\/\/plassmat.cnrs-imn.fr\/en\/techniques-and-equipment\/ellipsometry\/","title":{"rendered":"Ellipsometry"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"3943\" class=\"elementor elementor-3943 elementor-620\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-e7be2cd elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e7be2cd\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-70dff61\" data-id=\"70dff61\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d7deb96 elementor-widget elementor-widget-breadcrumbs\" data-id=\"d7deb96\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"breadcrumbs.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<p id=\"breadcrumbs\"><span><span><a href=\"https:\/\/plassmat.cnrs-imn.fr\/en\/home\/\">Home<\/a><\/span><\/span><\/p>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-1267f4e elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"1267f4e\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a14af36\" data-id=\"a14af36\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-d2afb61 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"d2afb61\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-ea849c8\" data-id=\"ea849c8\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-f5d24c2 elementor-widget elementor-widget-heading\" data-id=\"f5d24c2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">Ellipsometry<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a65a658 elementor-widget elementor-widget-text-editor\" data-id=\"a65a658\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Ellipsometry is an optical technique of surface characterization used to determine the optical properties of the materials, in particular <strong> the thickness of thin films and optical indices<\/strong>.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e7a63e7 elementor-widget elementor-widget-text-editor\" data-id=\"e7a63e7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>A beam of light is directed onto the sample, and the reflected light is analyzed using parameterized models. Unlike most optical methods, which study variations in light intensity, ellipsometry is based on <strong>measuring variations in the intensity and the polarization state of the light signal reflected<\/strong> by the sample.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7e8112e elementor-widget elementor-widget-text-editor\" data-id=\"7e8112e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The technique is non-destructive and non-invasive, and can be used as a control tool during sample deposition, etching or processing, thanks to real-time in situ monitoring.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-1289798 elementor-section-boxed elementor-section-height-default elementor-section-height-default elementor-invisible\" data-id=\"1289798\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;slideInUp&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-310327a\" data-id=\"310327a\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-1e791c7 elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-image\" data-id=\"1e791c7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"512\" height=\"512\" src=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png\" class=\"attachment-full size-full wp-image-3533\" alt=\"\" srcset=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png 512w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-300x300.png 300w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-150x150.png 150w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-270x270.png 270w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-192x192.png 192w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-180x180.png 180w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-32x32.png 32w\" sizes=\"(max-width: 512px) 100vw, 512px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f5e6f8c elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-heading\" data-id=\"f5e6f8c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Our UVISEL Horiba Jobin Yvon ellipsometer<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-50be71f6 elementor-skin-carousel elementor-arrows-yes elementor-widget elementor-widget-media-carousel\" data-id=\"50be71f6\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;slides_per_view&quot;:&quot;1&quot;,&quot;slides_to_scroll&quot;:&quot;1&quot;,&quot;space_between&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:50,&quot;sizes&quot;:[]},&quot;slides_per_view_tablet&quot;:&quot;1&quot;,&quot;slides_per_view_mobile&quot;:&quot;1&quot;,&quot;slides_to_scroll_mobile&quot;:&quot;1&quot;,&quot;skin&quot;:&quot;carousel&quot;,&quot;effect&quot;:&quot;slide&quot;,&quot;show_arrows&quot;:&quot;yes&quot;,&quot;speed&quot;:500,&quot;autoplay&quot;:&quot;yes&quot;,&quot;autoplay_speed&quot;:5000,&quot;loop&quot;:&quot;yes&quot;,&quot;space_between_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:10,&quot;sizes&quot;:[]},&quot;space_between_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:10,&quot;sizes&quot;:[]}}\" data-widget_type=\"media-carousel.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-swiper\">\n\t\t\t\t\t<div class=\"elementor-main-swiper swiper\" role=\"region\" aria-roledescription=\"carousel\" aria-label=\"Slides\">\n\t\t\t\t<div class=\"swiper-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t<div class=\"swiper-slide\" role=\"group\" aria-roledescription=\"slide\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-carousel-image\" role=\"img\" aria-label=\"Univ-nantes16308_DSF9572\" style=\"background-image: url(&#039;https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/Univ-nantes16308_DSF9572.jpg&#039;)\">\n\n\t\t\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\t\t\t<div class=\"swiper-slide\" role=\"group\" aria-roledescription=\"slide\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-carousel-image\" role=\"img\" aria-label=\"Univ-nantes16309_DSF9574\" style=\"background-image: url(&#039;https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/Univ-nantes16309_DSF9574.jpg&#039;)\">\n\n\t\t\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<div class=\"elementor-swiper-button elementor-swiper-button-prev\" role=\"button\" tabindex=\"0\" aria-label=\"Previous\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"eicon-chevron-left\"><\/i>\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<div class=\"elementor-swiper-button elementor-swiper-button-next\" role=\"button\" tabindex=\"0\" aria-label=\"Next\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"eicon-chevron-right\"><\/i>\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-512f764\" data-id=\"512f764\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-bd5c083 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"bd5c083\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-adfbd28 elementor-invisible\" data-id=\"adfbd28\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;gradient&quot;,&quot;animation&quot;:&quot;slideInRight&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7377c0c elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"7377c0c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-envelope\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Contact and rates<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7045469 elementor-widget elementor-widget-text-editor\" data-id=\"7045469\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>To know the rates and have access to our ellipsometer, please contact us by email: <\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-49e6d57 elementor-align-left elementor-mobile-align-justify elementor-widget elementor-widget-button\" data-id=\"49e6d57\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"mailto:ellipso-plassmat@cnrs-imn.fr\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">ellipso-plassmat@cnrs-imn.fr<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9416013 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"9416013\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Research partnerships<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-722acfe elementor-widget elementor-widget-text-editor\" data-id=\"722acfe\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li>National collaboration with the <a href=\"https:\/\/iccf.uca.fr\/\" target=\"_blank\" rel=\"noopener\">Institut de Chimie de Clermont-Ferrand<\/a> (ICCF);<\/li><li>International collaboration with the <a href=\"https:\/\/www.ceitec.eu\/\" target=\"_blank\" rel=\"noopener\">Central European Institute of Technology<\/a> (CEITEC) in the Czech Republic.<\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-e411073 elementor-section-boxed elementor-section-height-default elementor-section-height-default elementor-invisible\" data-id=\"e411073\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;slideInUp&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-2efbd99 elementor-hidden-mobile\" data-id=\"2efbd99\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;gradient&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-cdd4efa elementor-widget elementor-widget-spacer\" data-id=\"cdd4efa\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-54159ac\" data-id=\"54159ac\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-e3df5ad elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e3df5ad\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-27b9932\" data-id=\"27b9932\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e2b3fee elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-image\" data-id=\"e2b3fee\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"512\" height=\"512\" src=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png\" class=\"attachment-full size-full wp-image-3533\" alt=\"\" srcset=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png 512w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-300x300.png 300w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-150x150.png 150w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-270x270.png 270w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-192x192.png 192w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-180x180.png 180w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-32x32.png 32w\" sizes=\"(max-width: 512px) 100vw, 512px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dea557c elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-heading\" data-id=\"dea557c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Technical specifications<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8eb0179 elementor-widget elementor-widget-text-editor\" data-id=\"8eb0179\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul>\n<li>Spectral range: 250-825 nm;<\/li>\n<li>Light spot size: 5 mm to 500 microns;<\/li>\n<li>Spatial resolution: ~1 mm2<sup>; <\/sup><\/li>\n<li>Substrate holder adjustable in X, X and Z directions.\n<ul>\n<li style=\"list-style-type: none;\"> <\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-745dc45 elementor-widget elementor-widget-text-editor\" data-id=\"745dc45\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Characteristics required for the materials under study:<\/p><ul><li>flat substrates (size &gt;1cm<sup>2<\/sup>), homogeneous (micron-scale), slightly rough (&lt; 50 nm) and absorbing over the 1.5-5 eV spectral range;<\/li><li>homogeneous (micron-scale) thin layers in the sample plane, with thickness d in the range: 0.1 nm &lt; d &lt; 1 \u03bcm.<\/li><\/ul><p>In practice, when the conditions are right, layer thicknesses are determined down to 1 nm, and optical indices down to 5 10<sup>-3<\/sup>.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-2afff59 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2afff59\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-255c559 elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"255c559\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-794fa667\" data-id=\"794fa667\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-51fa86e8 elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-image\" data-id=\"51fa86e8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"512\" height=\"512\" src=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png\" class=\"attachment-full size-full wp-image-3533\" alt=\"\" srcset=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png 512w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-300x300.png 300w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-150x150.png 150w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-270x270.png 270w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-192x192.png 192w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-180x180.png 180w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-32x32.png 32w\" sizes=\"(max-width: 512px) 100vw, 512px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-53b30a40 elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-heading\" data-id=\"53b30a40\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Examples and applications<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-7ca7c67 elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7ca7c67\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d516323\" data-id=\"d516323\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-0d272d9 elementor-widget elementor-widget-text-editor\" data-id=\"0d272d9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The study reports on <strong>in situ spectroscopic ellipsometry monitoring<\/strong> of the <strong>production process of titanium dioxide thin film<\/strong> and the influence of growth conditions on structure, morphology and optical properties.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ae16505 elementor-widget elementor-widget-text-editor\" data-id=\"ae16505\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Optical index values are determined by ellipsometric analysis of thin films deposited at low temperature by plasma-enhanced chemical vapor deposition. <\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5caf55a elementor-align-left elementor-mobile-align-justify elementor-widget elementor-widget-button\" data-id=\"5caf55a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"https:\/\/hal.science\/hal-03361038v1\" target=\"_blank\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Read the publication<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-7e66b81\" data-id=\"7e66b81\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-48763d4 elementor-widget elementor-widget-image\" data-id=\"48763d4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex1_compr.png\" data-elementor-open-lightbox=\"yes\" data-elementor-lightbox-title=\"Suivi in situ par ellipsom\u00e9trie spectroscopique du proc\u00e9d\u00e9 d\u2019\u00e9laboration des couches minces de Ti02\" data-e-action-hash=\"#elementor-action%3Aaction%3Dlightbox%26settings%3DeyJpZCI6MzcyOCwidXJsIjoiaHR0cHM6XC9cL3BsYXNzbWF0LmNucnMtaW1uLmZyXC93cC1jb250ZW50XC91cGxvYWRzXC8yMDIzXC8xMlwvZXgxX2NvbXByLnBuZyJ9\">\n\t\t\t\t\t\t\t<img decoding=\"async\" width=\"660\" height=\"321\" src=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex1_compr.png\" class=\"attachment-full size-full wp-image-3728\" alt=\"\" srcset=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex1_compr.png 660w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex1_compr-300x146.png 300w\" sizes=\"(max-width: 660px) 100vw, 660px\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-584e8bd elementor-widget elementor-widget-text-editor\" data-id=\"584e8bd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Left: schematic layer stacking used to describe the thin film deposited on the Si substrate.<\/p>\n<p>Right: the refractive index of TiO<sub>2<\/sub> (without vacuum inclusions) for varying deposition conditions (ion energy and modulation of injected power for plasma activation), as a function of photon energy. CW mode is represented by solid lines, PD mode by dotted lines.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-be331e9 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"be331e9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-947daaa elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"947daaa\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-edbf4a2\" data-id=\"edbf4a2\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-86deb72 elementor-widget elementor-widget-text-editor\" data-id=\"86deb72\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Ti<sub>x<\/sub>Si<sub>1-x<\/sub>O<sub>2<\/sub> blend materials are interesting choices for developing new optical and electrical applications.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0edb5cf elementor-widget elementor-widget-text-editor\" data-id=\"0edb5cf\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Ellipsometry is used to <strong>determine the optical properties of these thin-film materials<\/strong>, synthesized by plasma-enhanced chemical vapor deposition. The results of the calculation are then compared with the experimental results.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c529347 elementor-align-left elementor-mobile-align-justify elementor-widget elementor-widget-button\" data-id=\"c529347\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"https:\/\/journals.aps.org\/prb\/abstract\/10.1103\/PhysRevB.95.195163\" target=\"_blank\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Read the publication<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-6e1961f\" data-id=\"6e1961f\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-8b4bb60 elementor-widget elementor-widget-image\" data-id=\"8b4bb60\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex2_compr.png\" data-elementor-open-lightbox=\"yes\" data-elementor-lightbox-title=\"Mesures ellipsom\u00e9triques effectu\u00e9es sur les oxydes mixtes a-TixSi1-xO2\" data-e-action-hash=\"#elementor-action%3Aaction%3Dlightbox%26settings%3DeyJpZCI6MzcyOSwidXJsIjoiaHR0cHM6XC9cL3BsYXNzbWF0LmNucnMtaW1uLmZyXC93cC1jb250ZW50XC91cGxvYWRzXC8yMDIzXC8xMlwvZXgyX2NvbXByLnBuZyJ9\">\n\t\t\t\t\t\t\t<img decoding=\"async\" width=\"500\" height=\"311\" src=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex2_compr.png\" class=\"attachment-full size-full wp-image-3729\" alt=\"\" srcset=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex2_compr.png 500w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/12\/ex2_compr-300x187.png 300w\" sizes=\"(max-width: 500px) 100vw, 500px\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9fb0b35 elementor-widget elementor-widget-text-editor\" data-id=\"9fb0b35\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Comparison of Tauc band gap calculated and extracted from the analysis of ellipsometric measurements carried out on a-Ti<sub>x<\/sub>Si<sub>1-x<\/sub>O<sub>2<\/sub> mixed oxides, as a function of the x composition parameter.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-f8bacab elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"f8bacab\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Ellipsometry Ellipsometry is an optical technique of surface characterization used to determine the optical properties of the materials, in particular the thickness of thin films and optical indices. A beam of light is directed onto the sample, and the reflected light is analyzed using parameterized models. Unlike most optical methods, which study variations in light [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":3805,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-3943","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.4 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Ellipsometry - PLASSMAT<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/plassmat.cnrs-imn.fr\/en\/techniques-and-equipment\/ellipsometry\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Ellipsometry - PLASSMAT\" \/>\n<meta property=\"og:description\" content=\"Ellipsometry Ellipsometry is an optical technique of surface characterization used to determine the optical properties of the materials, in particular the thickness of thin films and optical indices. A beam of light is directed onto the sample, and the reflected light is analyzed using parameterized models. 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