{"id":4266,"date":"2023-11-08T14:30:39","date_gmt":"2023-11-08T14:30:39","guid":{"rendered":"https:\/\/plassmat.cnrs-imn.fr\/techniques-and-equipment\/sem-fib-microscopies\/zeiss-merlin\/"},"modified":"2026-10-13T09:13:07","modified_gmt":"2026-10-13T09:13:07","slug":"zeiss-merlin","status":"publish","type":"page","link":"https:\/\/plassmat.cnrs-imn.fr\/en\/techniques-and-equipment\/sem-fib-microscopies\/zeiss-merlin\/","title":{"rendered":"Zeiss Merlin"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"4266\" class=\"elementor elementor-4266 elementor-1739\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-eb9f2c7 elementor-reverse-mobile elementor-reverse-tablet elementor-section-boxed elementor-section-height-default elementor-section-height-default elementor-invisible\" data-id=\"eb9f2c7\" data-element_type=\"section\" data-e-type=\"section\" 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100vw, 512px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dea557c elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-heading\" data-id=\"dea557c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Technical specifications<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e6463dd elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"e6463dd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8eb0179 elementor-widget elementor-widget-text-editor\" data-id=\"8eb0179\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The electron source used in the Merlin is a thermal field-emission cathode, known as a Schottky emitter (ZrO \/ W cathode). Due to the filament voltage (Fil I), ZrO diffuses toward the cathode tip, reducing the work function of the electrons from 4.6 eV to 2.8 eV. Depending on the cathode temperature and the field strength measured at the cathode tip\u2014generated by the emitter electrode potential\u2014an equilibrium is established that stabilizes the work function of the field-emission cathode.  <\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c133bce elementor-widget elementor-widget-text-editor\" data-id=\"c133bce\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<table><tbody><tr><td width=\"267\"><p><strong>Resolution<\/strong><\/p><p>(Measurements taken on a Plano S1969 gold-on-carbon sample with a scan speed of 3 and 60-fold line averaging)<\/p><\/td><td width=\"298\"><p>1.0 nm at 15 kV at the optimal working distance<\/p><p>2.1 nm at 1 kV at the optimal working distance<\/p><p>3.0 nm at 0.2 kV at the optimal working distance<\/p><p>3.0 nm at 20 kV and 10 nA at a working distance (WD) of 8.5 mm<\/p><\/td><\/tr><tr><td width=\"267\"><p><strong>Acceleration voltage<\/strong><\/p><\/td><td width=\"298\"><p>0.02 kV to 30 kV<\/p><\/td><\/tr><tr><td width=\"267\"><p><strong>Probe current<\/strong><\/p><\/td><td width=\"298\"><p>10 pA to 300 nA<\/p><\/td><\/tr><tr><td width=\"267\"><p><strong>Magnification<\/strong><\/p><\/td><td width=\"298\"><p>x12 to x2,000,000 compared to a Polaroid reference<\/p><\/td><\/tr><tr><td width=\"267\"><p><strong>Working Distance<\/strong><\/p><\/td><td width=\"298\"><p>from 1.5 mm to 50 mm<\/p><\/td><\/tr><tr><td width=\"267\"><p><strong>Room Dimensions  <\/strong><\/p><\/td><td width=\"298\"><p>inner diameter 330 mm<\/p><p>height 270 mm<\/p><\/td><\/tr><tr><td width=\"267\"><p><strong>Platinum Race  <\/strong><\/p><\/td><td width=\"298\"><p>X\/Y = 130 mm<\/p><p>Z = 50 mm<\/p><p>T = -3\u00b0 to +70\u00b0<\/p><p>continuous 360\u00b0 rotation<\/p><\/td><\/tr><tr><td width=\"267\"><p><strong>Maximum sample weight<\/strong><\/p><\/td><td width=\"298\"><p>500 g<\/p><\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-59888fa elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"59888fa\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4aaadaa elementor-widget elementor-widget-text-editor\" data-id=\"4aaadaa\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The Merlin has three <strong>imaging sensors<\/strong>:<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f643566 elementor-widget elementor-widget-text-editor\" data-id=\"f643566\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<table><tbody><tr><td width=\"119\"><p><strong> <\/strong><\/p><\/td><td width=\"150\"><p><strong>Inlens<\/strong><\/p><\/td><td width=\"150\"><p><strong>SE2<\/strong><\/p><\/td><td width=\"148\"><p><strong>AsB<\/strong><\/p><\/td><\/tr><tr><td width=\"119\"><p><strong>Electron type<\/strong><\/p><\/td><td width=\"150\"><p>High Schools<\/p><\/td><td width=\"150\"><p>High Schools<\/p><\/td><td width=\"148\"><p>Re-broadcasts<\/p><\/td><\/tr><tr><td width=\"119\"><p><strong>Special Features<\/strong><\/p><\/td><td width=\"150\"><p>Low-magnification shadows (&lt;200);<\/p><p>Significant surface carbon pollution<\/p><\/td><td width=\"150\"><p>Suitable for low magnification;<\/p><p>Not suitable for low WD values;<br\/>Not very sensitive to surface carbon contamination<\/p><\/td><td width=\"148\"><p>Includes a gain adjustment in addition to brightness and contrast;<\/p><p>Often requires a higher current and\/or a lower scanning speed than the other two<\/p><\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-aad607e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"aad607e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-3b47a75 elementor-widget elementor-widget-text-editor\" data-id=\"3b47a75\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The Merlin is equipped with an <strong>EDX<\/strong> (<em>Energy-Dispersive X-ray Spectrometer<\/em>) <strong>detector<\/strong> with the following specifications:<\/p><ul><li><p>Silicon Drift crystal with a nominal active surface area of 50 mm\u00b2;<\/p><\/li><li><p>SATW Light Element Window for the detection of elements from beryllium through uranium.<\/p><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2afff59 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2afff59\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4e3f3ed elementor-widget elementor-widget-text-editor\" data-id=\"4e3f3ed\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The Merlin is equipped with a <strong>WDX spectrometer<\/strong> (<em>Wavelength Dispersive X-ray Spectrometer)<\/em> that uses standards to quantify the elements present in the sample, particularly light elements or those at very low concentrations (&lt;1%). This spectrometer features a 6-crystal rotator, covering a wide range of wavelengths from 0.07 keV to 10.84 keV. <\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-11064d1 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"11064d1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-82d34c1 elementor-widget elementor-widget-text-editor\" data-id=\"82d34c1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The Merlin enables <strong>EBSD acquisitions<\/strong> using its Nordlys II S camera, also from Oxford Instruments. It is located to the right of the microscope chamber. This camera features front-mounted detectors for imaging, known as FSDs ( <em>ForeScatter Detectors<\/em>). These detectors reveal the grain and subgrain structure of the tilted sample.   <\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-00a4dfd elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"00a4dfd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-40f5a61 elementor-widget elementor-widget-text-editor\" data-id=\"40f5a61\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The Merlin SEM can also be equipped with a <strong>heated microtensile stage<\/strong> to observe microstructures in real time during mechanical testing of samples.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ba70a1e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"ba70a1e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-top-column elementor-element elementor-element-f0c40cc elementor-hidden-mobile\" data-id=\"f0c40cc\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;gradient&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a8b8101 elementor-widget elementor-widget-spacer\" data-id=\"a8b8101\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4442fb6 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4442fb6\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element 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src=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png\" class=\"attachment-full size-full wp-image-3533\" alt=\"\" srcset=\"https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon.png 512w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-300x300.png 300w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-150x150.png 150w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-270x270.png 270w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-192x192.png 192w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-180x180.png 180w, https:\/\/plassmat.cnrs-imn.fr\/wp-content\/uploads\/2023\/08\/cropped-favicon-32x32.png 32w\" sizes=\"(max-width: 512px) 100vw, 512px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4b9d84b0 elementor-widget__width-auto elementor-widget-mobile__width-inherit elementor-widget elementor-widget-heading\" data-id=\"4b9d84b0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Other SEM microscopy equipment<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-4dc6ffe elementor-section-boxed elementor-section-height-default elementor-section-height-default elementor-invisible\" data-id=\"4dc6ffe\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;slideInUp&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 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